FABRIKASI MATERIAL NANO STRUKTUR SnO2 SEBAGAI SENSING ELEMEN PADA SENSOR GAS CO UNTUK MEMANTAU GAS BUANG KENDARAAN BERMOTOR

Abstract

Abstract : The need for chemical sensor technology in applications for environmental monitoring has increased in recent years. In practice, the sensing elements must be relatively small in size, robust, and should not require a large sensing sample volume. The microelectromechanical systems or MEMS technology use in the fabrication of chemical sensing Microsystems, Tin oxide (SnO2) sensors are generally operated in air at the temperature range between 200 and 400◦C. The chemisorption of atmospheric gases takes place at the surface of the SnO2. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by method spray pyrolysis. We also considered some techniques to maintain the stability of a nanostructure for long-term usage of the sensing layers. This paper describes the detail design, fabrication process of gas sensor devices based on tin dioxide using thick film technology and its responses to carbon monoxide gas. The sensor device consists of layers of a heater, a pair of electrode and a sensitive layer (tin dioxide). It was observed those thick film gas sensors based on tin dioxide are suitable for detection of carbon monoxide. These sensor devices are expected to detect CO in the form of single or mixture of gases

Keywords : Mikrosensor, Gas carbon monoxide, MEMS, Nanotechnology